(Misalignment inspection equipment, displacement inspection equipment, misalignment checker)
Equipment to measure misalignment amount after laminating two sheet substrates. It can measure misalignment amount of marks of individual cells allocated in the panel at high speed, in addition to misalignment amount of marks provided on four corners of the panel.
It can also measure the seal width, etc., depending on customer requests.
It can handle up to G8 size, and achieve high repeatability at high speed with a unique image processing mechanism.
This equipment has a track record of being used for many panel manufacturing processes.
Company:Shin-Etsu Engineering Co., LTD.